| Identification | ||
| Name | Hexamethyldisilazane | |
| Synonyms | 1,1,1,3,3,3-Hexamethyldisilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine; Hexamethyl disilizane; HMDS | |
|
||
| Molecular Structure |
|
|
| Molecular Formula | C6H19NSi2 | |
| Molecular Weight | 161.39 | |
| CAS Registry Number | 999-97-3 | |
| EINECS | 213-668-5 | |
| Properties | ||
| Density | 0.765 | |
| Melting point | -78 ºC | |
| Boiling point | 125 ºC | |
| Refractive index | 1.4069-1.4089 | |
| Flash point | 20 ºC | |
| Water solubility | REACTS | |